Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Citación estilo ChicagoCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
Cita MLACampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
Warning: These citations may not always be 100% accurate.