Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Chicago Edition CitationCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
Deismireacht MLACampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
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