Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Style de citation ChicagoCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
Style de citation MLACampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
Attention : ces citations peuvent ne pas être correctes à 100%.