Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Chicago Style aipamenaCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
MLA aipamenaCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.