Cita APA

Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.

Citación estilo Chicago

Campbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.

Cita MLA

Campbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.