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Interlayer dielectrics for semiconductor technologies
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Published: |
Amsterdam
Elsevier Academic Press
2003
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| LEADER | 00435nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | |a 0125112211 | ||
| 082 | |a 620.195 |b MUR.I | ||
| 100 | |a Murarka, S P,Ed. | ||
| 245 | |a Interlayer dielectrics for semiconductor technologies | ||
| 260 | |a Amsterdam |b Elsevier Academic Press |c 2003 | ||
| 942 | |c BK | ||
| 999 | |c 15502 |d 15502 | ||
| 952 | |0 0 |1 0 |4 0 |6 620_195000000000000_MUR_I |7 0 |9 17810 |a CAMPUS |b CAMPUS |d 2017-08-19 |l 0 |o 620.195 MUR.I |p 11204 |r 2017-08-19 |w 2017-08-19 |y BK | ||