MADOU MARC J. (2012). FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.3 (3.). CRC.
Chicago Edition CitationMADOU MARC J. FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.3. 3. AUSTRALIA: CRC, 2012.
MLA Edition CitationMADOU MARC J. FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.3. 3. CRC, 2012.
Warning: These citations may not always be 100% accurate.