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Ion implantation in semiconductors : silicon and germanium, eng /
| Main Author: | |
|---|---|
| Language: | Undetermined |
| Published: |
1970.
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| Subjects: |
| LEADER | 00468nam a2200133Ia 4500 | ||
|---|---|---|---|
| 001 | 19710 | ||
| 008 | 170722s9999 xx 000 0 und d | ||
| 100 | |a Mayer, James W. Etc | ||
| 245 | |a Ion implantation in semiconductors : |b silicon and germanium, eng / | ||
| 260 | |c 1970. | ||
| 653 | |a Electron Physics | ||
| 942 | |c GEN | ||
| 999 | |c 80329 |d 80329 | ||
| 952 | |0 0 |1 0 |4 0 |6 C_9B5_C_6_000000000000000_L0 |7 0 |8 LC1 |9 112618 |a LIB |b LIB |d 2013-03-25 |h LC1 |o C9B5, C 6 L0 |p 135876 |r 2017-08-12 |w 2017-08-12 |y GEN | ||