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Design, modeling and analysis of micromachined silicon sensor (MEMS) /
| Main Author: | |
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| Format: | Printed Book |
| Language: | Undetermined |
| Subjects: |
| LEADER | 00480nam a2200133Ia 4500 | ||
|---|---|---|---|
| 001 | 176163 | ||
| 008 | 170722s9999 xx 000 0 und d | ||
| 100 | |a Thampi Paul | ||
| 245 | |a Design, modeling and analysis of micromachined silicon sensor (MEMS) / | ||
| 502 | |a Thesis (Ph.D.)--University of Kerala | ||
| 653 | |a Engineering | ||
| 942 | |c REF | ||
| 999 | |c 169217 |d 169217 | ||
| 952 | |0 0 |1 0 |4 0 |6 D_650134_P9RT |7 0 |8 RT |9 234263 |a LIB |b LIB |d 2017-08-12 |h RT |o D6501,3:4 P9(RT) |p G36671 |r 2017-08-12 |w 2017-08-12 |y REF | ||