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Design and development of a photothermal inages for wafer metrology and subsurface microscopy /
| Main Author: | |
|---|---|
| Format: | Ph.D Thesis |
| Language: | Undetermined |
| Published: |
University of Kerala ,
2005.
|
| Subjects: |
| LEADER | 00542nam a2200145Ia 4500 | ||
|---|---|---|---|
| 001 | 151766 | ||
| 008 | 170722s9999 xx 000 0 und d | ||
| 100 | |a Sreekumar, K. | ||
| 245 | |a Design and development of a photothermal inages for wafer metrology and subsurface microscopy / | ||
| 260 | |b University of Kerala , |c 2005. | ||
| 502 | |a Thesis (Ph.D.)--Physics, 2005. | ||
| 653 | |a Physics | ||
| 942 | |c TH | ||
| 999 | |c 167135 |d 167135 | ||
| 952 | |0 0 |1 0 |4 0 |6 C_53D6532_P5RT |7 0 |8 RT |9 231905 |a LIB |b LIB |d 2017-08-12 |o C5:3:(D65,32) P5(RT) |p G34078 |r 2017-08-12 |w 2017-08-12 |y TH | ||