APA Edition Citation

May, G. S., & Sze , S. M. (2004). Fundamentals of semiconductor fabrication. John Wiley.

Chicago Edition Citation

May, Gary S., and Simone M. Sze. Fundamentals of Semiconductor Fabrication. Singapore: John Wiley, 2004.

MLA Edition Citation

May, Gary S., and Simone M. Sze. Fundamentals of Semiconductor Fabrication. John Wiley, 2004.

Warning: These citations may not always be 100% accurate.