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00921nam a2200217Ia 4500 |
001 |
128482 |
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170722s9999 xx 000 0 und d |
020 |
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|a 0195105087
|
100 |
|
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|a Campbell, Stephen A.
|
245 |
|
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|a Science and engineering of microelectronic fabrication /
|
250 |
|
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|a 2nd ed.
|
260 |
|
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|a New York :
|b Oxford University Press ,
|c 1996,2001.
|
300 |
|
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|a 536 p.
|c 23cms
|
490 |
|
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|a Oxford series in electrical engineering
|
500 |
|
|
|a Ed.1,1996
|
653 |
|
|
|a Electronics Engineering
|
942 |
|
|
|c GEN
|
999 |
|
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|c 117665
|d 117665
|
952 |
|
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|b LIB
|d 2017-08-12
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|r 2017-08-12
|w 2017-08-12
|y GEN
|
952 |
|
|
|0 0
|1 0
|4 0
|6 D_653_N61P11TB
|7 0
|9 166203
|a LIB
|b LIB
|d 2017-08-12
|o D65,3 N6;1,P11(TB)
|p 243229
|r 2017-08-12
|w 2017-08-12
|y GEN
|
952 |
|
|
|0 0
|1 0
|4 0
|6 D_653_N61P11TB
|7 0
|8 TB
|9 166204
|a LIB
|b LIB
|d 2017-08-12
|o D65,3 N6;1,P11(TB)
|p 255643
|r 2017-08-12
|w 2017-08-12
|y TB
|