Campbell, S. A. (1996). Science and engineering of microelectronic fabrication (2nd ed.). Oxford University Press.
Chicago Edition CitationCampbell, Stephen A. Science and Engineering of Microelectronic Fabrication. 2nd ed. New York: Oxford University Press, 1996.
MLA Edition CitationCampbell, Stephen A. Science and Engineering of Microelectronic Fabrication. 2nd ed. Oxford University Press, 1996.
Warning: These citations may not always be 100% accurate.