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Micro electro mechanical system design /
| Main Author: | Allen, James J. |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
Boca Raton :
Taylor & Francis,
2005.
|
| Series: | Mechanical engineering (Taylor & Francis) ;
192. |
| Subjects: | |
| Online Access: | Publisher description |
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