MEMS and nanotechnology for gas sensors /

Bibliographic Details
Main Authors: Roy, Sunipa, Sarkar, Chandan Kumar (Author)
Format: Printed Book
Language:English
Published: London: CRC Press,Taylor and Francis, c2016.
Subjects:
Gas detectors > Design and construction.
Microelectromechanical systems > Design and construction.
Microfabrication.
Nanomanufacturing.
Table of Contents:
  • Section 1. Fabrication procedure
  • section 2. Sensor applications.

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