Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology (3rd ed.). CRC Press.
Chicago Edition CitationMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. Boca Raton, FL: CRC Press, 2012.
MLA Edition CitationMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. CRC Press, 2012.
Warning: These citations may not always be 100% accurate.