APA Edition Citation

Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology (3rd ed.). CRC Press.

Chicago Edition Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. Boca Raton, FL: CRC Press, 2012.

MLA Edition Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. CRC Press, 2012.

Warning: These citations may not always be 100% accurate.