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Ion implantation in semiconductors /
| Outros Autores: | |
|---|---|
| Formato: | Printed Book |
| Idioma: | English |
| Publicado em: |
New York :
Plenum Press,
1977.
|
| LEADER | 00449nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 150624b xxu||||| |||| 00| 0 eng d | ||
| 082 | |a 621.38152 | ||
| 245 | |a Ion implantation in semiconductors / | ||
| 260 | |a New York : |b Plenum Press, |c 1977. | ||
| 300 | |a 753 p. | ||
| 700 | |a Chernow, Fred | ||
| 942 | |c BK | ||
| 999 | |c 26178 |d 26178 | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381520000000000_CHE_I |7 0 |9 26177 |a UL |b UL |c ST2 |d 1998-09-01 |l 0 |o 621.38152 CHE/I |p 37590 |r 2012-10-27 |w 2012-10-27 |y BK | ||