The Physics of Micro/Nano-Fabrication

Bibliographic Details
Main Author: Brodie, Ivor and Muray, Julius J.
Other Authors: Ivor Brodie and Julius J. Muray
Format: Printed Book
Published: Plenum Press, New York Springer 1992
Description
Physical Description:xix,650p.
ISBN:978-81-8489-413-4

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