Brodie, I. a. M., & Ivor Brodie and Julius J. Muray. (1992). The Physics of Micro/Nano-Fabrication. Springer.
Chicago Edition CitationBrodie, Ivor and Muray, and Ivor Brodie and Julius J. Muray. The Physics of Micro/Nano-Fabrication. Plenum Press, New York: Springer, 1992.
MLA Edition CitationBrodie, Ivor and Muray, and Ivor Brodie and Julius J. Muray. The Physics of Micro/Nano-Fabrication. Springer, 1992.
Warning: These citations may not always be 100% accurate.