Loading...
Physics of radio-frequency plasmas /
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Printed Book |
| Language: | English |
| Published: |
Cambridge :
Cambridge University Press,
2011, ©2011.
|
| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/enhancements/fy1208/2010042728-t.html http://assets.cambridge.org/97805217/63004/cover/9780521763004.jpg http://www.loc.gov/catdir/enhancements/fy1208/2010042728-b.html http://www.loc.gov/catdir/enhancements/fy1208/2010042728-d.html |
Table of Contents:
- Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.