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Foundations of vaccuum science and technology/
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Published: |
N Y
J W
1998
|
| LEADER | 00425 a2200109 4500 | ||
|---|---|---|---|
| 082 | |a 533.5 LAF/F | ||
| 100 | |q Lafferly James M | ||
| 245 | |a Foundations of vaccuum science and technology/ |c ed by James M Lafferly | ||
| 260 | |a N Y |b J W |c 1998 | ||
| 942 | |c REF | ||
| 999 | |c 168673 |d 168673 | ||
| 952 | |0 0 |1 0 |2 ddc |4 0 |6 533_500000000000000_LAF_F |7 0 |9 186702 |a PHY |b PHY |c REF |d 2010-10-07 |i 3189 |l 2 |m 0 |o 533.5 LAF/F |p PHY3189 |r 2015-06-10 |s 2015-06-10 |w 2010-10-07 |y REF | ||