APA Edition Citation

Graff Klaus. (2000). Metal impurities in silicon-device fabrication. Springer.

Chicago Edition Citation

Graff Klaus. Metal Impurities in Silicon-device Fabrication. Berlin: Springer, 2000.

MLA Edition Citation

Graff Klaus. Metal Impurities in Silicon-device Fabrication. Springer, 2000.

Warning: These citations may not always be 100% accurate.