APA Edition Citation

Powell Ronald A. (1984). Dry etching for microelectronics. N H.

Chicago Edition Citation

Powell Ronald A. Dry Etching for Microelectronics. Amsterdam: N H, 1984.

MLA Edition Citation

Powell Ronald A. Dry Etching for Microelectronics. N H, 1984.

Warning: These citations may not always be 100% accurate.