Campbell, S. A. (2012). The science and engineering of microelectronic fabrication (2nd ed.). Oxford University Press.
Chicago Edition CitationCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New Delhi: Oxford University Press, 2012.
MLA Edition CitationCampbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. Oxford University Press, 2012.
Warning: These citations may not always be 100% accurate.