Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications (3rd ed.). CRC Press.
Chicago-tyylinen lähdeviittausMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS-manufacturing Techniques and Applications. 3rd ed. Boca Raton: CRC Press, 2012.
MLA-viiteMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS-manufacturing Techniques and Applications. 3rd ed. CRC Press, 2012.
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