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Modeling MEMS and NEMS /
| Main Author: | |
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| Other Authors: | |
| Format: | Printed Book |
| Published: |
Boca Raton
Chapman&Hall
2003
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| Subjects: |
| Item Description: | Includes index. |
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| Physical Description: | 357p. |
| ISBN: | 1-58488-306-5 |