APA Edition Citation

O'Mara William C et al. (2005). Handbook of semiconductor silicon technology. Crest.

Chicago Edition Citation

O'Mara William C et al. Handbook of Semiconductor Silicon Technology. New Delhi: Crest, 2005.

MLA Edition Citation

O'Mara William C et al. Handbook of Semiconductor Silicon Technology. Crest, 2005.

Warning: These citations may not always be 100% accurate.