APA Edition Citation

Stephen, A. (2004). Science and engineering of microelectronic fabrication. OUP.

Chicago Edition Citation

Stephen, A.Campbell. Science and Engineering of Microelectronic Fabrication. New York: OUP, 2004.

MLA Edition Citation

Stephen, A.Campbell. Science and Engineering of Microelectronic Fabrication. OUP, 2004.

Warning: These citations may not always be 100% accurate.