Behrisch, R. (1981). Sputtering by particle bombardment I: PHysical sputtering of single-element solids. Springer-Verlag.
Chicago Stili AlıntıBehrisch, R. Sputtering by Particle Bombardment I: PHysical Sputtering of Single-element Solids. Berin: Springer-Verlag, 1981.
MLA AlıntıBehrisch, R. Sputtering by Particle Bombardment I: PHysical Sputtering of Single-element Solids. Springer-Verlag, 1981.
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