Behrisch, R. (1981). Sputtering by particle bombardment I: PHysical sputtering of single-element solids. Springer-Verlag.
Chicago ZitierstilBehrisch, R. Sputtering by Particle Bombardment I: PHysical Sputtering of Single-element Solids. Berin: Springer-Verlag, 1981.
MLA ZitierstilBehrisch, R. Sputtering by Particle Bombardment I: PHysical Sputtering of Single-element Solids. Springer-Verlag, 1981.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.