Loading...
Glow discharge processes: sputtering and plasema etching
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
New York
John Wiley
1980
|
| Subjects: |
Electricity
> Physics
> Optics
> Biophysics
> Astrophysics
> Nuclear physics
> Radioactivity
> Quantum theory
> Mechanics
> Hydrostatics
> Thermodynamics
> Science
> Chemistry
> Electronics
> Amplifiers- electronics
> Cybernetics
> digital electronics
> Electric conductors
> Electronic circuits
> Semiconductors
> Superconductors
> Transistors
> Microelectronics
> Semiconductor
> Engineering
> Technology
> electricity and electronics
|
| LEADER | 01045nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20151026130603.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | |||
| 022 | |||
| 040 | |a Adlib | ||
| 082 | |a 537.525 | ||
| 245 | |a Glow discharge processes: sputtering and plasema etching | ||
| 250 | |||
| 260 | |a New York |b John Wiley |c 1980 | ||
| 300 | |a xv, 406 p. | ||
| 500 | |a | ||
| 100 | |a Chapman, Brain | ||
| 700 | |||
| 942 | |c BK |6 _ | ||
| 653 | |a Electricity |a Physics |a Optics |a Biophysics |a Astrophysics |a Nuclear physics |a Radioactivity |a Quantum theory |a Mechanics |a Hydrostatics |a Thermodynamics |a Science |a Chemistry |a Electronics |a Amplifiers- electronics |a Cybernetics |a digital electronics |a Electric conductors |a Electronic circuits |a Semiconductors |a Superconductors |a Transistors |a Microelectronics |a Semiconductor |a Engineering |a Technology |a electricity and electronics | ||
| 999 | |c 8420 |d 8420 | ||
| 952 | |0 0 |1 0 |4 0 |6 537525_CHA |7 0 |9 19834 |a UL |b UL |d 2010-06-16 |o 537.525 CHA |p 00033197 |r 2010-06-16 |w 2010-06-16 |y BK | ||