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Glow discharge processes: sputtering and plasema etching
| Auteur principal: | |
|---|---|
| Format: | Printed Book |
| Langue: | English |
| Publié: |
New York
John Wiley
1980
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| Sujets: |
Electricity
> Physics
> Optics
> Biophysics
> Astrophysics
> Nuclear physics
> Radioactivity
> Quantum theory
> Mechanics
> Hydrostatics
> Thermodynamics
> Science
> Chemistry
> Electronics
> Amplifiers- electronics
> Cybernetics
> digital electronics
> Electric conductors
> Electronic circuits
> Semiconductors
> Superconductors
> Transistors
> Microelectronics
> Semiconductor
> Engineering
> Technology
> electricity and electronics
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| Description: | |
|---|---|
| Description matérielle: | xv, 406 p. |