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Ion implementation in semiconductors and other materials
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| 格式: | Printed Book |
| 语言: | English |
| 出版: |
New York
Plenum
1973
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| 主题: |
| Item Description: | ref. at the end of each chap."International symposium on ion implantation in semiconductors and other materials, New York, December, 1972." |
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| 实物描述: | xii, 658p.illus. |