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Ion implementation in semiconductors and other materials
| Egile nagusia: | |
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| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
New York
Plenum
1973
|
| Gaiak: |
| Alearen deskribapena: | ref. at the end of each chap."International symposium on ion implantation in semiconductors and other materials, New York, December, 1972." |
|---|---|
| Deskribapen fisikoa: | xii, 658p.illus. |