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Ion implementation in semiconductors and other materials
| Hovedforfatter: | |
|---|---|
| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
New York
Plenum
1973
|
| Fag: |
| Emne beskrivelse: | ref. at the end of each chap."International symposium on ion implantation in semiconductors and other materials, New York, December, 1972." |
|---|---|
| Fysisk beskrivelse: | xii, 658p.illus. |