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Ion implementation in semiconductors and other materials

Bibliographic Details
Main Author: Crowder, Billy L (ed. by)
Format: Printed Book
Language:English
Published: New York Plenum 1973
Subjects:
Description
Item Description: ref. at the end of each chap."International symposium on ion implantation in semiconductors and other materials, New York, December, 1972."
Physical Description:xii, 658p.illus.