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|a 9788132219125
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| 080 |
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|a 621.382
|b VIN
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| 100 |
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|a Vinoy, K.J....[et.al.]
|
| 245 |
|
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|a Micro and smart devices and systems
|c by K.J. Vinoy......[et.al.]
|
| 260 |
|
|
|b Springer
|a New Delhi
|c 2014
|
| 300 |
|
|
|a xxvi, 508p.
|
| 490 |
|
|
|a Springer tracts in mechanical engineering
|
| 653 |
|
|
|a Microsensors
|
| 653 |
|
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|a Microactuators
|
| 653 |
|
|
|a Microelectronics
|
| 653 |
|
|
|a MEMS
|
| 942 |
|
|
|c BK
|6 _
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| 999 |
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|c 70958
|d 70958
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