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CMOS-MEMS

Bibliographic Details
Main Author:	Brand, Oliver
Other Authors:	Fedder, Gary K; ed
Format:	Printed Book
Language:	English
Published:	Germany Wiley-VCH Verlag 2013
Series:	Advanced micro and nanosystems
Subjects:	Integrated circuits design CMOS-MEMS-Biological and chemical application Microelectromechanical systems CMOS based sensors

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