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CMOS-MEMS
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| Other Authors: | |
| Format: | Printed Book |
| Language: | English |
| Published: |
Germany
Wiley-VCH Verlag
2013
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| Series: | Advanced micro and nanosystems
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| Subjects: |
| Physical Description: | xiv, 594p. |
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| ISBN: | 9783527334995 |