CMOS-MEMS

Bibliographic Details
Main Author: Brand, Oliver
Other Authors: Fedder, Gary K; ed
Format: Printed Book
Language:English
Published: Germany Wiley-VCH Verlag 2013
Series:Advanced micro and nanosystems
Subjects:
Integrated circuits design
CMOS-MEMS-Biological and chemical application
Microelectromechanical systems
CMOS based sensors
Description
Physical Description:xiv, 594p.
ISBN:9783527334995

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