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Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe

書目詳細資料
主要作者:	Joshy, N V
其他作者:	Jayaraj, M K; guided by
格式:	Ph.D Thesis
語言:	English
出版:	Kochi Department of Physics; CUSAT 2008
主題:	Plasma physics Radio frequency sputtering system

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