Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe

Detalles Bibliográficos
Autor Principal: Joshy, N V
Outros autores: Jayaraj, M K; guided by
Formato: Ph.D Thesis
Idioma:English
Publicado: Kochi Department of Physics; CUSAT 2008
Subjects:
Plasma physics
Radio frequency sputtering system
Descripción
Descrición Física:ix, 212p.

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