Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe

Detalles Bibliográficos
Autor principal: Joshy, N V
Otros Autores: Jayaraj, M K; guided by
Formato: Ph.D Thesis
Lenguaje:English
Publicado: Kochi Department of Physics; CUSAT 2008
Materias:
Plasma physics
Radio frequency sputtering system
Descripción
Descripción Física:ix, 212p.

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