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140226b xxu||||| |||| 00| 0 eng d |
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|a 9780521764834
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| 080 |
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|a 621.382
|b JON
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| 100 |
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|a Jones, Thomas B
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| 245 |
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|a Electromechanics and MEMS
|c Thomas B Jones and Nenad G Nenadic
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| 260 |
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|c 2013
|b Cambridge University Press
|a Cambridge
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| 300 |
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|a xx, 559p.
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| 653 |
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|a Microelectromechanical system (MEMS)
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| 653 |
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|a Electromechanics
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| 700 |
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|a Nemadic, Nemad G
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| 942 |
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