|
|
|
|
| LEADER |
00634 a2200193 4500 |
| 005 |
20151026133235.0 |
| 008 |
131106b xxu||||| |||| 00| 0 eng d |
| 020 |
|
|
|a 9780080964546
|
| 080 |
|
|
|a 681.2:620.3
|b LEA
|
| 100 |
|
|
|a Leach, Richard K
|
| 245 |
|
|
|a Fundamental principles of engineering nanometrology
|
| 260 |
|
|
|b Elsevier
|c 2010
|a Amsterdam
|
| 300 |
|
|
|a xxvi, 321p.
|
| 653 |
|
|
|a Nanometrology
|
| 653 |
|
|
|a Nanotechnology
|
| 653 |
|
|
|a Coordinate metrology
|
| 942 |
|
|
|c BK
|6 _
|
| 999 |
|
|
|c 66068
|d 66068
|
| 952 |
|
|
|0 0
|1 0
|2 udc
|4 0
|6 68126203_LEA
|7 0
|9 78393
|a UL
|b UL
|d 2013-02-16
|g 0.00
|o 681.2:620.3 LEA
|p 00069168
|r 2013-02-16
|v 0.00
|w 2013-02-16
|y BK
|