Nanofabrication using focused ion and electron beams principles and applications

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Bibliographic Details
Main Author: Utke, Ivo; ed (ed. by.)
Other Authors: Moshkalev, Stanislav, Russell, Phillip
Format: Printed Book
Language:English
Published: New York Oxford University Press 2012
Series:Nanomanufacturing series
Subjects:
Nanostructured materials
Ion beam nanotechnology
Electron beams - Industrial applications
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Nanofabrication using focused ion and electron beams: principles and applications/
Published 2012
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