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Nanofabrication using focused ion and electron beams principles and applications

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Dades bibliogràfiques
Autor principal:	Utke, Ivo; ed (ed. by.)
Altres autors:	Moshkalev, Stanislav, Russell, Phillip
Format:	Printed Book
Idioma:	English
Publicat:	New York Oxford University Press 2012
Col·lecció:	Nanomanufacturing series
Matèries:	Nanostructured materials Ion beam nanotechnology Electron beams - Industrial applications

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