Utke, I. e., Moshkalev, S., & Russell, P. (2012). Nanofabrication using focused ion and electron beams: Principles and applications. Oxford University Press.
Chicago Edition CitationUtke, Ivo; ed, Stanislav Moshkalev, and Phillip Russell. Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. New York: Oxford University Press, 2012.
MLA Edition CitationUtke, Ivo; ed, et al. Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. Oxford University Press, 2012.
Warning: These citations may not always be 100% accurate.