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Fundamentals of microfabrication and nanotechnology

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Bibliografiska uppgifter
Huvudupphovsman:	Madou, Marc J
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Boca Raton CRC Press 2012
Upplaga:	3rd ed.
Ämnen:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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