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Fundamentals of microfabrication and nanotechnology

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Detalhes bibliográficos
Autor principal:	Madou, Marc J
Formato:	Printed Book
Idioma:	English
Publicado em:	Boca Raton CRC Press 2012
Edição:	3rd ed.
Assuntos:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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