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Fundamentals of microfabrication and nanotechnology

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Bibliografski detalji
Glavni autor:	Madou, Marc J
Format:	Printed Book
Jezik:	English
Izdano:	Boca Raton CRC Press 2012
Izdanje:	3rd ed.
Teme:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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